A simple method for the deconvolution of Rutherford backscattering spectra
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Date
2001
Authors
Khalfaoui, R.
Zilabdi, M.
Behli, S.
Benazzouz, C.
Tobbeche, S.
Journal Title
Journal ISSN
Volume Title
Publisher
Elsevier
Abstract
Description
Keywords
Deconvolution, Spurious oscillations, Simulation, Rutherford backscattering spectra, Ion implantation