Investigation and study of the electrical characteristics of anodic oxide films SiO2 annealed at various temperatures
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Date
2007
Authors
Nadji, Becharia
Journal Title
Journal ISSN
Volume Title
Publisher
Elsevier
Abstract
Description
Keywords
Annealing oxidation, Fowler-Nordheim conduction, Interface states density, Electrical characterisation, MOS capacitors, Pure water