Metal-assisted electroless etching of silicon in aqueous NH 4HF 2 solution
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Date
2012
Journal Title
Journal ISSN
Volume Title
Publisher
Elsevier
Abstract
Description
Keywords
Silicon nanostructures, Silicon nanowires, Metal-assisted electroless etching, Catalyst, Chemical deposition, Electroless, Electroless chemical etching, Etching parameters, Etching process, Etching solutions, Etching temperature, New solutions, P-type silicon, Silicon surfaces, Silicon substrates